| 摘要 |
PROBLEM TO BE SOLVED: To provide a crystal growing apparatus suppressing abrasion of a bearing of a driving shaft for stirring a melt, and obtaining a crystal having a large size and high quality. SOLUTION: This apparatus includes a reaction vessel 10 for growing a crystal on a seed substrate dipped into a melt by reacting raw material gas with the melt in a heated and pressurized atmosphere, and a stirring device for stirring the melt by rotating the driving shaft provided through the reaction vessel 10 around the shaft, and has a constitution in which the driving shaft has a second driving shaft 41B provided with a locking part 41b2 lockable with the reaction vessel 10 in the axial direction, on a shaft body 41b1 penetrating the reaction vessel 10, and has a slide bearing 70b provided between the second driving shaft 41B and the reaction vessel 10, in which either of a slip plane 72a facing to the locking part 41b2 and a slip plane 72b facing to the reaction vessel 10, in the axial direction, is formed of a ceramic material. COPYRIGHT: (C)2012,JPO&INPIT |
