| 摘要 |
PROBLEM TO BE SOLVED: To provide a sensor element array having sensitivity in a plurality of directions at low cost. SOLUTION: A sensor element array comprises a first sensor element, a second sensor element, and a sheet substrate having the arranged first and second sensor elements. The sheet substrate has a slit with a broadened gap and includes a substrate surface at a position where the first sensor element is arranged, which is set at a crossing angle to a substrate surface at a position where the second sensor element is arranged. COPYRIGHT: (C)2012,JPO&INPIT |
