发明名称 Device and method for cleaning the wire of a wire saw
摘要 <p>According to the present disclosure, a device (100, 300, 400, 500, 700), method and use for cleaning a wire (150) of a wire saw adapted for sawing a semiconductor work piece (130) is provided. The device (100, 300, 400, 500, 700) includes a container (110) including a first opening (115). The container (110) is filled with loose solid particles (111) and adapted such that the wire (150) can pass via the first opening (115) through the loose solid particles (111).</p>
申请公布号 EP2759386(A1) 申请公布日期 2014.07.30
申请号 EP20130153110 申请日期 2013.01.29
申请人 APPLIED MATERIALS SWITZERLAND SÀRL 发明人 PARK, JUNG EUNG;SUELDIA, RAPHAEL
分类号 B28D5/00;B28D5/04;H01L21/02 主分类号 B28D5/00
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