| 摘要 |
Because an electromagnetic chuck (20) supplies current to a specific microcoil among a plurality of microcoils (MC) and makes an object (M) exert an electromagnetic force working together with a magnet of the object (M), the object (M) can be held in a state where the object is set at a desired position (a position that corresponds to the microcoil to which current has been supplied) on a base surface. Further, by gas that blows out from a gas supply passage (42), a levitation force is given to the object (M), which can reduce effects of a friction force that acts between the object (M) and an upper surface of the electromagnetic chuck when the position of the object is set. |
