| 摘要 |
<p>One aspect of the present invention is to provide a thin film type solar cell manufacturing apparatus for uniformly depositing a material with desired physical characteristics by increasing a lifetime of a heating lamp and uniformly transferring temperature to a flexible substrate by preventing the heating lamp from being contaminated due to a by-product by separating a first space unit having a shower head which performs a deposition process from a second space unit having the heating lamp which performs a heating process, and a thin film type solar cell manufacturing apparatus according to an embodiment of the present invention includes: a supply chamber having a supply roll for supplying a flexible substrate; a winding chamber having a winding roll for retrieving a flexible substrate; and at least one deposition chamber arranged between the supply chamber and winding chamber and having a deposition space for performing a deposition process and a heating space for performing a heating process of the flexible substrate.</p> |
