发明名称 |
METHODS AND APPARATI FOR HANDLING, HEATING AND COOLING A SUBSTRATE UPON WHICH A PATTERN IS MADE BY A TOOL IN HEAT FLOWABLE MATERIAL COATING, INCLUDING SUBSTRATE TRANSPORT, TOOL LAYDOWN, TOOL TENSIONING, AND TOOL RETRACTION |
摘要 |
A workpiece is transported using a porous belt, which belt delivers a workpiece to a chuck, upon which the workpiece is held by vacuum. The belt can be porous PTFE. A flexible stamp is preheated, before it is applied to a workpiece, by drawing the stamp toward a heated plate, for instance by vacuum. |
申请公布号 |
EP2758227(A1) |
申请公布日期 |
2014.07.30 |
申请号 |
EP20120833284 |
申请日期 |
2012.09.22 |
申请人 |
1366 TECHNOLOGIES INC. |
发明人 |
SACHS, EMANUEL, M.;KANE, PETER, E.;GATES, HOLLY, G.;HARRIS, DAMIEN, W.;POLITO, BENJAMIN, F.;INIRIO, HECTOR, A. |
分类号 |
B29C59/02 |
主分类号 |
B29C59/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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