发明名称 Temperature control device, test apparatus and control method thereof
摘要 A temperature control device which may control temperature of a reactor, and a test apparatus including the same are provided. The temperature control device includes at least one body, temperature controllers provided on the at least one body and configured to control a temperature or the at least one body, and at least one temperature sensor provided on the at least one body and configured to measure the temperature of the at least one body.
申请公布号 EP2759898(A1) 申请公布日期 2014.07.30
申请号 EP20140152402 申请日期 2014.01.24
申请人 SAMSUNG ELECTRONICS CO., LTD 发明人 OH, JOO YOUNG
分类号 G05D23/24 主分类号 G05D23/24
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