| 发明名称 |
AN INTEGRATED HIGH VACUUM PUMPING SYSTEM |
| 摘要 |
<p>The present invention relates to the integration of a TMP with the associated bypass line and valves so that a single sub-assembly is created. The housing of the TMP is significantly modified to accommodate the associated equipment necessary for constructing a high-vacuum system.</p> |
| 申请公布号 |
EP1781946(B1) |
申请公布日期 |
2014.07.30 |
| 申请号 |
EP20050779007 |
申请日期 |
2005.08.03 |
| 申请人 |
EDWARDS VACUUM, INC. |
发明人 |
BOGER, MICHAEL S.;MURPHY, DAIMHIN PAUL;BAILEY, CHRISTOPHER M.;ENOMOTO, YOSHIHIRO |
| 分类号 |
F04B17/03;F04B37/14;F04B53/06;F04D19/04 |
主分类号 |
F04B17/03 |
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