发明名称 FLAT-PLATE BONDING JIG AND METHOD OF MANUFACTURING FLAT-PLATE STACKED BODY
摘要 Provided is a jig having a structure that differs from conventional jigs and enables flat plates to be bonded while suppressing an air bubble formation. A flat-plate bonding jig is provided with the following: a first surface; a second surface that is on the opposite side of the first surface, has a plurality of suction holes for sucking a flat-plate, and is curved outward in a substantially arc shape; a main body connecting the first surface and the second surface; and a communication means that is disposed in the main body and allows the suction holes to communicate with a suction means.
申请公布号 EP2644372(A4) 申请公布日期 2014.07.30
申请号 EP20110842689 申请日期 2011.11.18
申请人 DENKI KAGAKU KOGYO KABUSHIKI KAISHA 发明人 EDA,YUKIO;IBAYASHI,TOSHIYUKI;KURIMURA,HIROYUKI;OGINO,YUTAKA;FUKUTAKA,EITARO;MATSUMOTO,TAKAYUKI
分类号 B32B7/12;C03C27/06;C03C27/12;G02F1/1333;H01L51/50;H05B33/04;H05B33/10;H05B33/14 主分类号 B32B7/12
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