发明名称 |
FLAT-PLATE BONDING JIG AND METHOD OF MANUFACTURING FLAT-PLATE STACKED BODY |
摘要 |
Provided is a jig having a structure that differs from conventional jigs and enables flat plates to be bonded while suppressing an air bubble formation. A flat-plate bonding jig is provided with the following: a first surface; a second surface that is on the opposite side of the first surface, has a plurality of suction holes for sucking a flat-plate, and is curved outward in a substantially arc shape; a main body connecting the first surface and the second surface; and a communication means that is disposed in the main body and allows the suction holes to communicate with a suction means. |
申请公布号 |
EP2644372(A4) |
申请公布日期 |
2014.07.30 |
申请号 |
EP20110842689 |
申请日期 |
2011.11.18 |
申请人 |
DENKI KAGAKU KOGYO KABUSHIKI KAISHA |
发明人 |
EDA,YUKIO;IBAYASHI,TOSHIYUKI;KURIMURA,HIROYUKI;OGINO,YUTAKA;FUKUTAKA,EITARO;MATSUMOTO,TAKAYUKI |
分类号 |
B32B7/12;C03C27/06;C03C27/12;G02F1/1333;H01L51/50;H05B33/04;H05B33/10;H05B33/14 |
主分类号 |
B32B7/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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