Scanner for GCIB system

摘要

Disclosed are an apparatus, system, and method for scanning a substrate or other workpiece through a gas-cluster ion beam (GCIB), or any other type of ion beam. The workpiece scanning apparatus is configured to receive and hold a substrate for irradiation by the GCIB and to scan it through the GCIB in two directions using two movements: a reciprocating fast-scan movement, and a slow-scan movement. The slow-scan movement is actuated using a servo motor and a belt drive system, the belt drive system being configured to reduce the failure rate of the workpiece scanning apparatus.

主权项

1. An apparatus for scanning a workpiece through an ion beam, comprising:
an elongated member adapted to mount a workpiece at a first end; a rotational mechanism mounting the elongated member at a point of rotation located on the elongated member away from the first end, and adapted to repetitively scan the workpiece through the ion beam along an arcuate path; a slow-scan mechanism suspending the elongated member and rotational mechanism, and adapted to cause linear movement of the rotational mechanism and the elongated member, to cause different portions of the workpiece to pass through the ion beam, the slow-scan mechanism comprising:
a shuttle drive assembly having a rail and a shuttle, the rotational mechanism being attached to and suspended by the shuttle at an attachment point located outside a longitudinal plane of symmetry of the rail;a first pulley;a second pulley;a first belt mounted over the first and second pulleys, and attached to the shuttle; anda drive mechanism to actuate the first belt.