Increasing the spatial resolution of dosimetry sensors

摘要

A two-dimensional array of memory cells may be used to implement a spatial dosimeter. The two-dimensional array of cells may be implemented by an integrated circuit memory. Because of the relatively small size of the integrated circuit memory, the resolution of the resulting array may be less than 100 nanometers. The change in threshold voltage of each of the cells, as a result of radiation exposure, may be used to calculate the dose seen at each cell, allowing dose profiles in two dimensions with sub-micrometer resolution.

主权项

1. A method comprising:
programming each of the plurality of cells; measuring a pre-exposure threshold voltage of each of the plurality of cells; exposing the plurality of cells to ionizing radiation; measuring a post-exposure threshold voltage of each of the plurality of cells; and determining a radiation dose of each of the plurality of cells based, at least in part, on the respective post-exposure threshold voltages of each of the plurality of cells and a predetermined average value for an intrinsic threshold voltage of the plurality of cells.