Optical waveguide and coupler apparatus and method of manufacturing the same

摘要

Optical waveguide and coupler devices and methods include a trench formed in a bulk semiconductor substrate, for example, a bulk silicon substrate. A bottom cladding layer is formed in the trench, and a core region is formed on the bottom cladding layer. A reflective element, such as a distributed Bragg reflector can be formed under the coupler device and/or the waveguide device. Because the optical devices are integrated in a bulk substrate, they can be readily integrated with other devices on a chip or die in accordance with silicon photonics technology. Specifically, for example, the optical devices can be integrated in a DRAM memory circuit chip die.

主权项

1. An optical device, comprising:
a trench having a substantially flat bottom surface formed in a semiconductor substrate; a first cladding layer disposed in the trench, the first cladding layer having a flat top surface extending entirely from one sidewall of the trench to an opposite sidewall of the trench; and at least one core region disposed above only a portion of the first cladding layer.