Charged particle beam device and sample observation method using a rotating detector

摘要

Provided is a charged particle beam device that outputs both an ion beam and an electron beam at a sample, has a common detector for both the ion beam and the electron beam in the charged particle beam device that processes and observes the sample, and is able to provide a detection unit to an appropriate position corresponding to the process details and observation technique of the sample. Provided are an electron beam optical column in which an electron beam for observing the observation surface of a sample is generated, an ion beam optical column in which an ion beam that processes the sample is generated, a detection device that detects a secondary signal generated from the sample or transmitted electrons, and a sample stage that is capable of mounting the detection device thereon; is rotatable in a horizontal plane that includes the optical axis of the electron beam and the optical axis of the ion beam about a cross point where both optical axes intersect; and is able to change the distance between the observation surface of the sample and the cross point.

主权项

1. A charged particle beam device comprising:
an ion beam optics column which irradiates a sample with an ion beam; an electron beam optics column which irradiates the sample with an electron beam; a first sample stage on which the sample is mounted and which is capable of planar movement and tilt movement; a detector which detects a signal generated from the sample; and a second sample stage on which the detector can be mounted, wherein, when the detector is mounted on the second sample stage, the second sample stage is capable of rotating within a plane that includes an optical axis of the electron beam optics column and an optical axis of the ion beam optics column, and that has a cross point at which the optical axis of the electron beam optics column and the optical axis of the ion beam optics column intersect as a center, so that the detector can tilt with respect to the first sample stage and the cross point, and a distance between the detector and the first sample stage or the cross point can be varied.