| 发明名称 | Apparatus for purifying a controlled-pressure environment | ||
| 摘要 | An apparatus for purifying a controlled-pressure environment in a chamber, including: a piece of lithium-aluminum alloy located in the chamber; an activation element arranged to impart energy to the piece of lithium-aluminum alloy to sublimate lithium from the piece of lithium-aluminum alloy; a feedback control system including a sensor system arranged to measure a condition within the chamber, and a controller in communication with the sensor and configured to control operation of the activation element according to an evaluation of the condition; and a collection plate located in the chamber and arranged to form a layer of the sublimated lithium on a surface of the collection plate. | ||
| 申请公布号 | US8790603(B2) | 申请公布日期 | 2014.07.29 |
| 申请号 | US201313924859 | 申请日期 | 2013.06.24 |
| 申请人 | KLA-Tencor Corporation | 发明人 | Zhuang Guorong V.;Delgado Gildardo |
| 分类号 | B01D7/00;B01D53/00;B01D53/74;F04B53/00;G05D99/00 | 主分类号 | B01D7/00 |
| 代理机构 | Simpson & Simpson, PLLC | 代理人 | Simpson & Simpson, PLLC |
| 主权项 | 1. An apparatus for purifying a controlled-pressure environment in a chamber, comprising: a piece of lithium-aluminum alloy located in the chamber; an activation element arranged to impart energy to the piece of lithium-aluminum alloy to sublimate lithium from the piece of lithium-aluminum alloy; a feedback control system including; a sensor system arranged to measure a condition within the chamber; and,a controller in communication with the sensor and configured to control operation of the activation element according to an evaluation of the condition; and, a collection plate located in the chamber and arranged to form a layer of the sublimated lithium on a surface of the collection plate. | ||
| 地址 | Milpitas CA US | ||