| 发明名称 | Method for ex-situ lift-out specimen preparation | ||
| 摘要 | A method for mounting a specimen on a specimen carrier for milling in an ex-situ lift-out (EXLO) milling process is described where “cross-section” specimens, plan view specimens, or bulk specimens may be lifted-out for analysis. The method comprising positioning the specimen on a recessed surface within a specimen carrier top surface so that a region to be milled is centered about a carrier opening formed through the specimen carrier. Peripheral edges of the specimen are then wedged against inwardly sloping side walls framing the recessed surface. Finally, the specimen is mounted to the specimen carrier so that a path of a milling beam intersects the region to be milled and carrier opening. | ||
| 申请公布号 | US8789826(B2) | 申请公布日期 | 2014.07.29 |
| 申请号 | US201314010780 | 申请日期 | 2013.08.27 |
| 申请人 | EXpressLO LLC | 发明人 | Giannuzzi Lucille A. |
| 分类号 | B23Q3/00;G21K5/10;H01J37/00;G01N1/00;H01J37/20;H01J37/30 | 主分类号 | B23Q3/00 |
| 代理机构 | Marger, Johnson & McCollom, P.C. | 代理人 | Marger, Johnson & McCollom, P.C. |
| 主权项 | 1. A method for mounting a specimen on a specimen carrier for milling in an ex-situ lift-out (EXLO) milling process where “cross-section” specimens, plan view specimens, bulk specimens may be lifted-out for analysis, the method comprising: positioning the specimen on a recessed surface within a specimen carrier top surface ex-situ so that a region to be milled is centered about a carrier opening formed through the specimen carrier; wedging peripheral edges of the specimen against inwardly sloping side walls framing the recessed surface; and mounting the specimen on the specimen carrier so that a path of a milling beam intersects the region to be milled and carrier opening. | ||
| 地址 | Fort Myers FL US | ||