Optical polarizer with nanotube array

摘要

An optical polarizer positioned before a light source for use in semiconductor wafer lithography including an array of aligned nanotubes. The array of aligned nanotubes cause light emitted from the light source and incident on the array of aligned nanotubes to be converted into polarized light for use in the semiconductor wafer lithography. The amount of polarization can be controlled by a voltage source coupled to the array of aligned nanotubes. Chromogenic material of a light filtering layer can vary the wavelength of the polarized light transmitted through the array of aligned nanotubes.

主权项

1. An optical polarizer positioned before a light source, said optical polarizer comprising:
an array of nanotubes; said array of nanotubes causing light emitted from said light source and incident on said array of nanotubes to be converted into polarized light; said optical polarizer being suitable for implementation as an extreme ultraviolet (EUV) light polarizer for use in EUV semiconductor wafer lithography.