Seed light generation device, light source device, adjustment method thereof, light irradiation device, exposure device, and device manufacturing method

摘要

A light source device including a seed light generation device, a light amplification unit which optically amplifies seed light generated by the seed light generation device, and a wavelength conversion unit which converts the wavelength of the light optically amplified by the light amplification unit. The seed light generation device includes a pulsed light generation unit which generates pulsed light having a single wavelength, a pulse modulation unit which selectively passes and extracts a part of the pulsed light, and a timing adjustment unit which relatively adjusts the extracting timing of the pulsed light by the pulse modulation unit during the generation period of the pulsed light by the pulse generation unit, according to an operation.

主权项

1. A light source device, comprising:
a seed light generation device which generates seed light to be optically amplified; a light amplification unit which optically amplifies the seed light generated by the seed light generation device; and a wavelength conversion unit which converts a wavelength of the light optically amplified by the light amplification unit, and outputs ultraviolet pulsed light, the seed light generation device including: a pulse generation unit which generates pulsed light having a single wavelength; a pulse modulation unit which selectively passes and extracts a part of the pulsed light; and a timing adjustment unit which adjusts a spectral width of the ultraviolet pulsed light to be output from the wavelength conversion unit by adjusting the extracting timing of the pulsed light by the pulse modulation unit during the generation period of the pulsed light by the pulse generation unit, according to an operation, wherein the timing adjustment unit adjusts the extracting timing during the generation period to a range that includes a timing when a light intensity decreases.