Compliant micro device transfer head with integrated electrode leads

摘要

A compliant micro device transfer head and head array are disclosed. In an embodiment a micro device transfer head includes a spring arm having integrated electrode leads that is deflectable into a space between a base substrate and the spring arm.

主权项

1. A micro device transfer head comprising:
a base substrate; a spring anchor coupled to the base substrate; a spring arm coupled to the spring anchor, the spring arm including:
a mesa structure suspended over the base substrate;a top electrode extending laterally from the spring anchor and over the mesa structure; anda bottom electrode extending laterally from the spring anchor underneath the mesa structure and wrapping around and over the mesa structure, wherein the top electrode and the bottom electrode are electrically isolated from each other; and a dielectric layer covering the top electrode and the bottom electrode over the mesa structure.