发明名称 |
Electronic component provided with Cu—Al—Co-based alloy electrode or wiring |
摘要 |
An object of the present invention is to provide an electronic component using a Cu-based conductive material that can suppress oxidization even in a heat treatment in an oxidizing atmosphere and that can suppress an increase in an electrical resistance. In an electronic component having an electrode or a wiring, a ternary alloy made from three elements consisting of Cu, Al, and Co is used as a Cu-based wiring material that can prevent oxidization of the electrode or the wiring. Specifically, part or the whole of the electrode or the wiring has a chemical composition in which an Al content is 10 at % to 25 at %, a Co content is 5 at % to 20 at %, and the balance is composed of Cu and unavoidable impurities, and the chemical composition represents a ternary alloy in which two phases of a Cu solid solution formed by Al and Co being dissolved into Cu and a CoAl intermetallic compound coexist together. |
申请公布号 |
US8790549(B2) |
申请公布日期 |
2014.07.29 |
申请号 |
US201013263359 |
申请日期 |
2010.04.08 |
申请人 |
Hitachi, Ltd. |
发明人 |
Kato Takahiko;Naito Takashi;Yamamoto Hiroki;Aoyagi Takuya;Watanabe Seiichi;Miura Seiji;Sakaguchi Norihito;Aoshima Kazuki;Ohkubo Kenji |
分类号 |
H01B1/02;H05K1/09;C22C9/00;C22C9/02;C22C9/01;C22C9/06 |
主分类号 |
H01B1/02 |
代理机构 |
Antonelli, Terry, Stout & Kraus, LLP. |
代理人 |
Antonelli, Terry, Stout & Kraus, LLP. |
主权项 |
1. An electronic component having an electrode or a wiring, wherein
part or the whole of the electrode or the wiring has a chemical composition in which an Al content is 10 at % to 25 at %, a Co content is 5 at % to 20 at %, and the balance is composed of Cu and unavoidable impurities, and the chemical composition represents a ternary alloy in which two phases of a Cu solid solution formed by Al and Co being dissolved into Cu and a CoAl intermetallic compound coexist together. |
地址 |
Tokyo JP |