Device for measuring the purity of ultrapure water

摘要

Disclosed is a method for analyzing the quantity of organic compounds existing in a liquid, such as ultrapure water, at the outlet from a purification device including in series a filter, an oxidizing device and a polishing device, and further including a resistivity measuring device for measuring the resitivity of water to determine the purity thereof. Only one resistivity measuring cell is used, and the outlet points of the filter and the oxidizing device are connected to the resistivity measuring cell by pipes provided with an analysis valve and/or check valves selectively enabling circulation of the liquid within them.

主权项

1. A method for analyzing the quantity of organic compound existing in a fluid, at the outlet from a purification device including in series a filter, an oxidizer, a polisher and only one resistivity measuring cell; said method comprising:
operating a connector and fluid circulation controller in a first mode, thereby prohibiting circulation of the fluid between the outlet point of said filter and the inlet point of said oxidizer whilst authorizing circulation of the fluid between the outlet point of said filter and the inlet point of said resistivity measuring cell; and operating said connector and fluid circulation controller in a second mode, thereby authorizing circulation of the fluid between the outlet point of said filter and the inlet point of said oxidizer whilst prohibiting circulation of the fluid between the outlet point of said filter and the inlet point of said resistivity measuring cell.