Movable body drive method and movable body drive system, and pattern formation method and pattern formation apparatus

摘要

A first positional information of a wafer stage is measured using an interferometer system such as, for example, a Z interferometer. At the same time, a second positional information of the wafer stage is measured using a surface position measurement system such as, for example, two Z heads. Moving average is applied to a difference between the first positional information and the second positional information for a predetermined measurement time to set a coordinate offset, which is used to inspect the reliability of output signals of the surface position measurement system. When the output signals are confirmed to be normal, servo control of the wafer stage is performed using a sum of the first positional information and the coordinate offset. According to this hybrid method, drive control of the wafer stage which has the stability of the interferometer and the precision of the Z heads becomes possible.

主权项

1. A pattern formation method in which a pattern is formed on an object held by a movable body moving substantially along a two-dimensional plane, the method comprising:
a drive process in which while positional information of the movable body in a direction orthogonal to the two-dimensional plane and a tilt direction with respect to the two-dimensional plane is detected using (i) a first detection device that detects the positional information of the movable body related to the direction orthogonal to the two-dimensional plane and the tilt direction with respect to the two-dimensional plane from measurement results using a measurement beam irradiated along the two-dimensional plane between an outside of an operating area of the movable body and the movable body and (ii) a second detection device that has a plurality of detection positions and detects positional information of the movable body related to the direction orthogonal to the two-dimensional plane at each detection position, the movable body is driven in at least one of the direction orthogonal to the two-dimensional plane and the tilt direction with respect to the two-dimensional plane based on the positional information detected by the first detection device; and a calibration process in which a predetermined calibration processing is performed using the detection information of the second detection device to improve alignment precision of a pattern with the object in at least one of the direction orthogonal to the two-dimensional plane and the tilt direction with respect to the two-dimensional plane.