Fault detection apparatuses and methods for fault detection of semiconductor processing tools

摘要

Fault detection apparatuses and methods for detecting a processing or hardware performance fault of a semiconductor production tool have been provided. In an exemplary embodiment, a method for detecting a fault of a semiconductor production tool includes sensing a signal associated with a test component of the production tool during operation of the production tool and converting the signal to an electronic test signal. A prerecorded signature signal corresponding to the test component is provided and the test signal and the prerecorded signature signal are compared.

主权项

1. A fault detection apparatus comprising:
a signature signal database configured to store a signature signal corresponding to operation of a test component of a semiconductor fabrication tool in a known state; and a comparator configured to compare a test signal received from a detection device and a signature signal received from the signature signal database, the test signal corresponding to a signal sensed from the test component of the semiconductor fabrication tool, the comparator further configured to perform a task based on a result of the comparison.