Device for treating disc-like article and method for operating same

摘要

A device for supporting and rotating a disc-like article includes:
a first rotor including a support for supporting the disc-like article, wherein the first rotor is located within a process chamber,a second rotor connected to a drive mechanism for rotating the second rotor, wherein the second rotor is coupled to the first rotor by magnetic forces without touching the first rotor, and the second rotor is located outside the process chamber and a wall is arranged between the first rotor and the second rotor, andat least one magnetic couple, wherein the couple includes a first coupling part and a second coupling part, wherein the first coupling part includes a coupling magnet mounted to the first rotor and the second coupling part includes a high temperature superconducting material,

wherein the magnetic couple(s) are arranged and/or formed so that no degree of freedom remains between the first and second rotor so that the first rotor moves together with the second rotor. A method for operating such device is disclosed.

主权项

1. A device for supporting and rotating a disc-like article comprising:
a first rotor comprising a support for supporting the disc-like article, wherein the first rotor is located within a process chamber, a second rotor connected to a drive mechanism for rotating the second rotor, wherein the second rotor is coupled to the first rotor by magnetic forces without touching the first rotor, and the second rotor is located outside the process chamber and a wall is arranged between the first rotor and the second rotor, and at least one magnetic couple, wherein the couple comprises a first coupling part and a second coupling part, wherein the first coupling part comprises a coupling magnet mounted to the first rotor and the second coupling part comprises a high temperature superconducting material (HTS) mounted to the second rotor, wherein the magnetic couple(s) are arranged and/or formed in a way so that no degree of freedom remains between the first rotor and the second rotor so that the first rotor moves together with the second rotor.