| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a substrate for an electro-optic device which is improved in a yield, and high in productivity, a substrate for an electro-optic device, an electro-optic device and an electronic apparatus.SOLUTION: A method for manufacturing a substrate for an electro-optic device includes: a process of forming a mask layer 71 having conductivity on a surface 11a of a mother substrate 60 from which a plurality of prism substrates 10 can be segmented; and an etching process of performing dry etching to the mother substrate 60 on which the mask layer 71 is formed, in which the mask layer 71 is divided into a plurality of regions before the etching process. |
