| 摘要 |
PROBLEM TO BE SOLVED: To provide a fluid control device which is hardly affected by the temperature change therein to be able to stably control a flow rate.SOLUTION: The fluid control device includes: an electric control valve which includes an electric driving part 7 and a flow rate control part 8 and is configured to change a flow rate by changing the degree of valve opening; a flowmeter sensor unit 3 which includes an ultrasonic oscillator for transmitting and receiving ultrasonic waves and converts an ultrasonic wave received by the ultrasonic oscillator to an electric signal; a flowmeter amplifier unit 5 which receives the electric signal to calculate a flow rate; and a control unit 6 which controls the degree of valve opening on the basis of the calculated flow rate. The flowmeter sensor unit 3 is disposed in a first casing 1, and the electric control valve, the flowmeter amplifier unit 5, and the control unit 6 are disposed in a second casing 4. Space layers 14a and 14b are provided between the first casing 1 and the second casing 4. |
