| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection device that enables a fine pattern to be inspected with high accuracy, and without causing reduction in throughput.SOLUTION: A specimen 1 is irradiated with linear polarized light having a polarization plane of 45 degrees with respect to an optical axis. After a polarization direction is rotated by a 1/2 wavelength plate 2006, light reflected upon the specimen 1 enters a first measurement image pickup sensor 2011 via a first measurement analyzer 2010, enters a second measurement image pickup sensor 2013 via a second measurement analyzer 2012, and enters an inspection image pickup sensor 2014 via an inspection analyzer 2009. A direction of each of transmission axes of these analyzers is different, and the direction of the transmission axis of the inspection analyzer 2009 is present between the direction of the transmission axis of the first measurement analyzer 2010 and the direction of the transmission axis of the second measurement analyzer 2012. |
