SUBSTRATE TRANSFER DEVICE FOR ROTATION VELOCITY MAINTENANCE OF EXTENSION ROLLER

摘要

The present invention provides a substrate transfer device to maintain rotational velocity for a power extension roller, installed within a process chamber of a linear deposition system to transfer the substrate by a transfer roller block formed by including a transfer roller and a frame to which the transfer roller is coupled, comprising an extension roller block extended to a transfer line by the transfer roller block; and coupled to a transfer roller shaft of the transfer roller block via a link O-ring to receive the power from the transfer roller block and transferring the substrate. By this means, the present invention connects the transfer roller to the extension roller via the link O-ring to power extend the transfer roller installed within the process chamber, thereby stably transferring the power of the transfer roller and improve stability in transferring the substrate.