| 摘要 |
PROBLEM TO BE SOLVED: To provide a processing method capable of reducing the possibility of burrs or peeling off of a metal film, by a simple method without special alteration of a cutting device.SOLUTION: The plate-like object has: multiple lines where cutting is planned; and multiple through-holes formed on the lines where cutting is planned, penetrating from a front surface to a back surface, and each including a metal film formed on an inner wall of the through-hole. The processing method of the plate-like object includes: a placing step for placing the plate-like object having the multiple through-holes on a support member; a fixing step for, after the placing step is performed, filling each through-hole with liquid, freezing the liquid, and fixing the plate-like object on the support member; and a cutting step for, after the fixing step is performed, cutting the plate-like object fixed on the support member, by a cutting blade along the lines where cutting is planned, in an atmosphere where the temperature is lower than the melting point of the frozen liquid. |
