发明名称 METHOD AND APPARATUS FOR MANUFACTURING MAGNETIC RECORDING MEDIUM
摘要 PROBLEM TO BE SOLVED: To provide a method and an apparatus for manufacturing a magnetic recording medium, for achieving both of prevention of degradation in a layer to be formed and improvement in productivity.SOLUTION: The method for manufacturing a magnetic recording medium comprises forming a magnetic recording layer, a protective layer and a lubricating layer, in this order on a target body to be laminated. The target body after the protective layer is formed thereon by use of a film-forming device is sealed in a transfer container unit without bringing air into contact with the target body; the transfer container unit is conveyed to a vapor-phase lubrication film-forming device; the target body sealed in the transfer container unit is taken out from the transfer container unit without bringing air into contact with the target body; and the lubricating layer is formed on the target body by a vapor-phase lubrication film-forming method in the vapor-phase lubrication film-forming device. The transfer container unit includes: a transfer container for sealing the target body; a spare chamber detachably connected to the film-forming device and to the vapor-phase lubrication film-forming device; a gate valve connecting the transfer container and the spare chamber; and a separation chamber that can be segmented by first and second valve elements of the gate valve. While the first valve element is open, the separation chamber is communicated with the spare chamber; and while the second valve element is open, the separation chamber is communicated with a storage chamber.
申请公布号 JP2014137828(A) 申请公布日期 2014.07.28
申请号 JP20130004783 申请日期 2013.01.15
申请人 SHOWA DENKO KK 发明人 TSUTAYA YASUYUKI;SHIOMI DAISUKE
分类号 G11B5/84;C23C14/56;G11B5/851 主分类号 G11B5/84
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