发明名称 METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
摘要 <p>PROBLEM TO BE SOLVED: To resolve a problem that, although thinning a semiconductor substrate is effective for improving performance of a semiconductor device, and a method of fixing a reinforcement member onto a surface of the semiconductor substrate via an adhesive agent layer and then processing a rear face is widespread, in this case, a step of removing the adhesive agent is required, which is wasteful.SOLUTION: When the adhesive agent layer is removed, the adhesive agent layer is residually left in a partial range, and the residual part is utilized for a protection film and the like. Since a removal step of an adhesive agent also serves as a part of a formation step and the like of the protection film, the part of the formation step and the like of the protection film can be omitted, and waste can be reduced.</p>
申请公布号 JP2014138014(A) 申请公布日期 2014.07.28
申请号 JP20130004439 申请日期 2013.01.15
申请人 TOYOTA MOTOR CORP 发明人 MATSUURA YUICHIRO;ITO TAKAHIRO
分类号 H01L21/304 主分类号 H01L21/304
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