| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an oscillation mirror element that enables suppression of a voltage value in a state where a voltage drop caused by a drain of a surface charge occurs from being detected by an inspection electrode.SOLUTION: An oscillation mirror element 100 comprises: a mirror section 1; a drive section 13a (13b) that is formed so as to come into contact with a top face 17a of a piezoelectric body 17, and includes an inspection electrode 19 for detecting an amount of deformation of the piezoelectric body 17 upon driving the mirror section 1 by applying a voltage to deform the piezoelectric body 17; an insulation layer 20 that is formed on the top face 17a of the piezoelectric body 17; and lead-out wiring 21 that is formed on a top face 20a of the insulation layer 20, connected to the inspection electrode 19, and extends to a side part 60a (60b) of a support section 60 serving as an external area of the drive section 13a (13b).</p> |
