| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a method for detecting particles with residual droplets restrained from accumulating in a particle detector.SOLUTION: A method for detecting particles with residual droplets restrained from accumulating in a particle detector 1, includes: collecting droplets dispersed in gas using a collection plate of an impactor 50 in the vicinity of production lines 81, 82 executing a series of processes in a predetermined cycle, at each of plural timings in the predetermined cycle; inspecting the collection plate and specifying a timing at which the particle detector 1 should be operated, among the plural timings; and operating the particle detector 1 at the identified timing to detect particles dispersed in the gas in the vicinity of the production lines 81, 82.</p> |
