发明名称 SPLITTING ELEMENT AND LASER TRANSFER DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a laser transfer device capable of manufacturing a high definition luminous layer pattern with high productivity, and a splitting element included in the laser transfer device.SOLUTION: The splitting element according to the present invention comprises: a substrate which laser beams enter in a first axial direction; and a plurality of reflection surfaces. The plurality of reflection surfaces are formed on the substrate while being aligned in a second axial direction intersecting with the first axial direction, and reflect a part of the laser beams respectively to emit a plurality of parallel split beams.
申请公布号 JP2014137592(A) 申请公布日期 2014.07.28
申请号 JP20130132345 申请日期 2013.06.25
申请人 ULVAC JAPAN LTD 发明人 ONISHI YOSHINORI;NAKAMURA FUMIO;OKAYAMA TOMOHIKO
分类号 G02B5/08;H01L51/50;H05B33/10;H05B33/24 主分类号 G02B5/08
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