发明名称 |
SPLITTING ELEMENT AND LASER TRANSFER DEVICE |
摘要 |
PROBLEM TO BE SOLVED: To provide a laser transfer device capable of manufacturing a high definition luminous layer pattern with high productivity, and a splitting element included in the laser transfer device.SOLUTION: The splitting element according to the present invention comprises: a substrate which laser beams enter in a first axial direction; and a plurality of reflection surfaces. The plurality of reflection surfaces are formed on the substrate while being aligned in a second axial direction intersecting with the first axial direction, and reflect a part of the laser beams respectively to emit a plurality of parallel split beams. |
申请公布号 |
JP2014137592(A) |
申请公布日期 |
2014.07.28 |
申请号 |
JP20130132345 |
申请日期 |
2013.06.25 |
申请人 |
ULVAC JAPAN LTD |
发明人 |
ONISHI YOSHINORI;NAKAMURA FUMIO;OKAYAMA TOMOHIKO |
分类号 |
G02B5/08;H01L51/50;H05B33/10;H05B33/24 |
主分类号 |
G02B5/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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