| 摘要 |
PROBLEM TO BE SOLVED: To provide a posture controller providable for an exposure capable of distance control between a mask and a substrate with a simple structure.SOLUTION: In the case the part bo be set is separated from a standard face, the pressing force of a cylinder is reduced by the reduction of the pressure loss in a nozzle pointed end, thus the part to be set is made close to the standard face, and, in the case the part to be set approaches the standard face, the pressing force of the cylinder is increased by the increase of the pressure loss in the nozzle pointed part, thus the part to be set is separated from the standard face. |
