发明名称 PHOTOSENSITIVE COMPOSITION
摘要 PROBLEM TO BE SOLVED: To provide a photosensitive resin composition which enables formation of a film with low dielectric constant.SOLUTION: There is provided a photosensitive resin composition comprising a polymer composed of a copolymer of a specific structure, a thermosetting crosslinking agent, and a photosensitizer. The photosensitive resin composition is applied, and heated at 230°C for 60 minutes to form a film with the thickness of 2 μm, and thereafter, relative dielectric constant measured at the frequency of 10 kHz is 4.0 or less.
申请公布号 JP2014137426(A) 申请公布日期 2014.07.28
申请号 JP20130005008 申请日期 2013.01.15
申请人 SUMITOMO BAKELITE CO LTD 发明人 IKEDA TAKAO;TAGASHIRA NOBUO;IMAMURA YUJI;ONISHI OSAMU
分类号 G03F7/023;C08F232/00;C08G59/42;G03F7/004;H01L21/027 主分类号 G03F7/023
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