发明名称 |
RESIN COMPOSITION, PRODUCTION METHOD OF RESIN COMPOSITION, RESIST COMPOSITION CONTAINING RESIN COMPOSITION, AND PATTERN FORMING METHOD USING RESIST COMPOSITION |
摘要 |
<p>PROBLEM TO BE SOLVED: To provide: a resin composition through a simple method, which is suitably used for a resist material containing a carboxyl group, and has a narrow molecular weight distribution; a production method of the resin composition; a resist composition containing the resin composition; and a pattern forming method using the resist composition.SOLUTION: The resin composition contains a borane-based radical polymerization initiator (A), a vinyl monomer (B) containing a carboxyl group and a vinyl monomer (C) that does not contain a carboxyl group.</p> |
申请公布号 |
JP2014136706(A) |
申请公布日期 |
2014.07.28 |
申请号 |
JP20130004257 |
申请日期 |
2013.01.15 |
申请人 |
HITACHI CHEMICAL CO LTD |
发明人 |
MURAKI TAKAHITO ; NUNOE JUN |
分类号 |
C08F220/04;C08F4/44;C08F212/06;C08F220/18;G03F7/033;H01L21/027 |
主分类号 |
C08F220/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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