发明名称 RESIN COMPOSITION, PRODUCTION METHOD OF RESIN COMPOSITION, RESIST COMPOSITION CONTAINING RESIN COMPOSITION, AND PATTERN FORMING METHOD USING RESIST COMPOSITION
摘要 <p>PROBLEM TO BE SOLVED: To provide: a resin composition through a simple method, which is suitably used for a resist material containing a carboxyl group, and has a narrow molecular weight distribution; a production method of the resin composition; a resist composition containing the resin composition; and a pattern forming method using the resist composition.SOLUTION: The resin composition contains a borane-based radical polymerization initiator (A), a vinyl monomer (B) containing a carboxyl group and a vinyl monomer (C) that does not contain a carboxyl group.</p>
申请公布号 JP2014136706(A) 申请公布日期 2014.07.28
申请号 JP20130004257 申请日期 2013.01.15
申请人 HITACHI CHEMICAL CO LTD 发明人 MURAKI TAKAHITO ; NUNOE JUN
分类号 C08F220/04;C08F4/44;C08F212/06;C08F220/18;G03F7/033;H01L21/027 主分类号 C08F220/04
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