| 摘要 |
PROBLEM TO BE SOLVED: To provide a film sticking apparatus and a film sticking method, in each of which generation of air bubbles between a substrate and a film or that of wrinkles in the film is prevented when the film is stuck, and residues of the film are restrained from remaining in a through-hole.SOLUTION: The film sticking apparatus includes: a supporting part for supporting the substrate having through-holes; a pressing part for exerting predetermined pressure and predetermined temperature on the film disposed on the first surface of the substrate to press the film to the substrate; a storage part for housing the supporting part and the pressing part. The supporting part has a pressurization part for introducing a fluid into the through-holes from the second surface of the substrate on the side opposed to the first surface thereof. In the pressing part, the film is pressed to the substrate under the first pressure at the first temperature and when the fluid is introduced into the through-holes by the pressurization part, the film is pressed to the substrate under the second pressure higher than the first pressure at the second temperature higher than the first temperature to fix the film to the first surface of the substrate. |
