| 摘要 |
The present invention relates to a device and a method for aligning a substrate and a mask. The present invention is to reduce manufacturing and operation costs using a compact device with simple functions and to improve precise alignment between a substrate and a mask. The present invention comprises a substrate carrier for accommodating the substrate, a mask carrier for accommodating the mask, a substrate positioning unit, and a mask positioning unit. The substrate positioning unit and the substrate carrier have a spherical contact surface in which each contact surface has the same diameter, are connected to each other to be separated, and can rotate and turn in a state of facing each other. The substrate carrier is fixed on the substrate positioning unit. A center point among the diameter of the contact surfaces fundamentally exists in the contact surface of the substrate. The purpose of the present invention can be solved by a method of combining alignment marks arranged on the substrate and the mask by allowing the substrate arranged on the rotatable and turnable substrate carrier to be in contact with the mask and aligning the mask on the substrate. |
