METHOD FOR MANUFACTURING VIBRATION ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a vibration element capable of exhibiting desired vibration characteristics easily and at low cost.SOLUTION: A method for manufacturing a vibration element comprises the steps of: thinning a piezoelectric substrate 20; flattening the piezoelectric substrate 20; forming a plurality of recessed parts 203 at least on one principal surface of the piezoelectric substrate 20; and dividing each recessed part 203 into individual pieces so that a thick part thicker than the recessed part 203 is located along at least a part of an outer edge of the recessed part 203.