| 摘要 |
PROBLEM TO BE SOLVED: To adjust super resolution effect.SOLUTION: The structured illumination device (100, 200 and 10) according to the present invention comprises: branch means (201-1) that branches an emitted light flux from a light source (100) into at least a pair of branch light fluxes; an illumination optical system (10) that arranges at least a pair of optical fibers (11-1 and 11-1') individually guiding the pair of branch light fluxes and a pair of light emitting edges (11A-1 and 11A-1') of the pair of optical fibers (11-1 and 11-1') at a mutually different position on a pupil plane (6A) of an objective lens (6) or a pupil conjugate plane (6A'), allows the pair of branch light fluxes emitted from the pair of light emitting edges to be interfered with each other on an object side of the objective lens (6), and illuminates a specimen (5) with an interference fringe; and adjustment means that adjusts a distance from each of the pair of light emitting edges to an optical axis of the illumination optical system. |
