发明名称 VIBRATION ELEMENT, VIBRATOR, OSCILLATOR, ELECTRONIC DEVICE, AND MOBILE UNIT
摘要 PROBLEM TO BE SOLVED: To provide a vibration element, a vibrator, an oscillator, an electronic device, and a mobile unit capable of exhibiting stable vibration characteristic by suppressing a change in vibration characteristic due to an external force such as acceleration.SOLUTION: A vibration element 1 comprises a vibration part 21, a piezoelectric substrate 2 including a thick part 22 greater in thickness than the vibration part 21, and a pair of excitation electrodes 31, 32 provided on the surface and reverse side of the vibration part 21. The thick part 22 has a second thick part 24 provided along a second outer edge 213 of the vibration part 21. The second thick part 24 has, at an end portion, opposite to a fixed part 29, of the vibration element 1 in a plan view, an outer edge part 243 crossing both of an X axis and a Z' axis.
申请公布号 JP2014138413(A) 申请公布日期 2014.07.28
申请号 JP20130007912 申请日期 2013.01.18
申请人 SEIKO EPSON CORP 发明人 OBATA NAOHISA
分类号 H03H9/19;H01L41/09;H01L41/18;H03H9/10 主分类号 H03H9/19
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