发明名称 |
APPARATUS FOR PROVIDING THE SAMPLE GAS AND METHOD THEREOF |
摘要 |
Provided are an apparatus and a method for supplying a sample gas. The apparatus for supplying a sample gas includes: a gas introduction unit; a first pressure gauge for measuring the pressure of the sample gas introduced through the gas introduction unit; a plurality of flow lines located between the gas introduction unit and a gas analysis unit to be opened and closed according to the pressure measured by the first pressure gauge; a plurality of control valves formed in the plurality of flow lines, respectively, to control opening/closing of the flow lines; a bypass line formed in at least one of the flow lines to discharge some of the sample gas flowing along the flow line; and a control unit for controlling the control value formed in the selected flow line by selecting one of the flow lines according to the pressure measured by the first pressure gauge. |
申请公布号 |
KR20140093511(A) |
申请公布日期 |
2014.07.28 |
申请号 |
KR20130006003 |
申请日期 |
2013.01.18 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
JEONG, JONG CHEOL;JEONG, KYUNG HWAN;KIM, JONG SOO;JUN, PIL KWON |
分类号 |
H01L21/02;G01N1/22;G01N1/34 |
主分类号 |
H01L21/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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