发明名称 METHOD FOR MANUFACTURING ELECTRONIC DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a method for manufacturing an electronic device capable of corresponding to on-demand, and having an electrode pattern that can be easily formed with a high accuracy.SOLUTION: A first layer 2 consisting of a material that is different from a material of a substrate, having a surface energy being higher than that of the substrate 1, and an electrode pattern shape, is formed on the substrate 1 by a gas curtain type laser CVD method, and a second layer 3 is formed on an upper surface of the first layer 2 with a conductive nano ink to form an electrode pattern of the electronic device.
申请公布号 JP2014138107(A) 申请公布日期 2014.07.28
申请号 JP20130006358 申请日期 2013.01.17
申请人 YAMAGATA UNIV;V TECHNOLOGY CO LTD 发明人 MIZUKAMI MAKOTO;OKU SHINYA;TOKITO SHIZUO;SHU MINTETSU;SUZUKI YOSHIKAZU
分类号 H01L21/28;C23C16/48;H01L21/285;H01L21/288 主分类号 H01L21/28
代理机构 代理人
主权项
地址