| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for stably forming a fine structure with high precision.SOLUTION: A method for forming a fine structure includes the steps of: forming a positive photosensitive resin layer on a first substrate, and patterning the positive photosensitive resin layer; preparing a second substrate capable of transmitting light therethrough; forming a water-repellent/non-water-repellent resin layer in which a reversible reaction of water-repellency/non-water-repellency proceeds with irradiation with light having different wavelengths, on the second substrate; forming a negative photosensitive resin layer on the water-repellent/non-water-repellent resin layer so as to be in direct contact with the water-repellent/non-water-repellent resin layer; pressing the first substrate to the second substrate so that the patterned positive photosensitive resin layer is embedded into the negative photosensitive resin layer; emitting light through the second substrate; and separating the water-repellent/non-water-repellent resin layer and the second substrate from the negative photosensitive resin layer. |
