| 摘要 |
PROBLEM TO BE SOLVED: To provide a separation device capable of easily separating a composite substrate.SOLUTION: A separation device which separates a composite substrate in which a first substrate and a second substrate are joined into the first substrate and the second substrate includes: a support base 2 which has a support face 211 supporting the composite substrate; side face support means 3 which supports the outer peripheral side face of the composite substrate; and separation means 4 which is inserted to the boundary between the first substrate and the second substrate supported by the support face 211 and the side face support means 3 to separate the first substrate and the second substrate. The separation means 4 includes: a separation member 41 which is arranged in parallel with the support face of the support base 2 and has a wedge part 412 inserted to the boundary between the first substrate and the second substrate; separation member positioning means 42 which moves the separation member 41 in a direction vertical to the support face 211 of the support base 2 to position the wedge part 412 in the boundary between the first substrate and the second substrate; and separation member advancing and retracting means 43 which advances and retracts the wedge part 412 of the separation member 41 to/from the boundary between the first substrate and the second substrate constituting the composite substrate. |
