| 摘要 |
PROBLEM TO BE SOLVED: To provide a geometric quantity acquisition device that calculates the straightness or flatness of an object in a state of removing the drift error of a sensor.SOLUTION: A geometric quantity acquisition device 50 for acquiring the flatness of a work-piece includes: a distance data acquisition unit 121 that acquires distance data while relatively moving a sensor head 9, having three distance sensors juxtaposed in a first direction, in the first direction with respect to the work-piece; a drift error removal unit 122 that removes a drift error from the distance data acquired by the distance data acquisition unit 121; and a geometric quantity calculation unit 123 that calculates geometric quantity on the basis of the distance data in which the drift error is removed by the drift error removal unit 122. |
