| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a semiconductor optical waveguide element with a structure capable of correcting a positional displacement in a width direction of two optical waveguides to be aligned.SOLUTION: In a first waveguide structure 15, a twelfth waveguide mesa part 21g and a twenty-second waveguide mesa part 23g are aligned in a second axis Ax2 direction on a second portion 13b of a substrate 13, and thus the twelfth waveguide mesa part 21g is optically coupled to the twenty-second waveguide mesa part 23g via a second semiconductor layer 23a on the second portion 13b of the substrate 13. Optical coupling is formed in the twelfth waveguide mesa part 21g and the twenty-second waveguide mesa part 23g which have wide widths. This coupling structure can compensate for an increase in deterioration of optical coupling due to positional displacement between a first waveguide mesa 21b of the first waveguide structure 15 and a second waveguide mesa 23b of a second waveguide structure 17, by adjusting a coupling length of the twelfth waveguide mesa part 21g and the twenty-second waveguide mesa part 23g which have wide widths.</p> |
