| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an oscillating mirror element capable of sufficiently suppressing distortion of a mirror part.SOLUTION: A laser scanner unit 1 (an oscillating mirror element) comprises: a mirror part 11 formed to be inclinable around a rotation axis A; inclinable frame parts 12 and 13 respectively connected with end parts 11a and 11b of the mirror part 11 positioned on an orthogonal center line B; drive parts 16 and 17 including a piezoelectric body 3b deformed by voltage application; and coupling beams 14 and 15 inclinable by coupling the frame parts 12 and 13 with the drive parts 16 and 17 and deforming the piezoelectric body 3b of the drive parts 16 and 17. The frame parts 12 and 13 are inclined by inclining the coupling beams 14 and 15, and the mirror part 11 is inclined by inclining the frame parts 12 and 13.</p> |
