| 摘要 |
PROBLEM TO BE SOLVED: To provide a transportation member capable of detecting that a transported body (an attracted body) is placed on the transportation member with accuracy, and to provide a transportation device using the transportation member.SOLUTION: In a transportation member 7, on an attraction surface side of a ceramic substrate 15 on which a semiconductor wafer 3 is placed, attraction electrodes K1 and K2 and measurement electrodes S1 and S2 are arranged via a predetermined space in a planar direction in which the attraction surface extends. Since attraction electrode parts 17, 19, 21, and 23 and a measurement electrode part 25 are protruded in an island shape in a plate thickness direction from the attraction surface of the ceramic substrate 15, even when the attraction electrode is energized, an electrical noise is less likely to be superposed on the measurement electrode. Therefore, it can be detected whether or not the semiconductor wafer is placed on the transportation member with accuracy. |
