发明名称 A METHOD OF GROWING SEMICONDUCTOR HETEROSTRUCTURES BASED ON GALLIUM NITRIDE
摘要 The method of growing non-polar epitaxial heterostructures for light-emitting diodes producing white emission and lasers, on the basis of compounds and alloys in AlGaInN system, comprising the step of vapor-phase deposition of one or multiple heterostructures layers described by the formula AlxGa1-xN(0<x≰1), wherein the step of growing A3N structures using (a)-langasite (La3Ga5SiO14) substrates is applied for the purposes of reducing the density of defects and mechanical stresses in heterostructures.
申请公布号 KR101423459(B1) 申请公布日期 2014.07.25
申请号 KR20087019326 申请日期 2007.02.06
申请人 发明人
分类号 H01L33/04;C30B25/18;C30B29/38;H01L33/00;H01L33/32 主分类号 H01L33/04
代理机构 代理人
主权项
地址
您可能感兴趣的专利